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ADVANCED PROCESS CONTROL
Today's manufacturers face the challenge of maximizing Overall Equipment Efficiency (OEE), factory throughput, and product yields in order to maintain the trends of reducing overall cost per function. The Applied Materials Advanced Process Control Platform (APC) is an integral part of a closed loop automation environment enabling manufacturers to improve return on assets (ROA) and overall manufacturing performance. Applied Materials APC applications detect and identify process and product deviations and make changes automatically to improve operations. The two major components of APC are run-to-run (R2R) control and Fault Detection and Classification (FDC).
- R2R control facilitates discrete process control, where the product recipe gets modified before the start of processing in order to minimize process drift, shift and variability. This increases control capability and reduces product scrap.
- FDC is an application used to perform tool, process and product health monitoring and diagnosis.
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