TOOLSIM
Animation simulation
ToolSim is a capacity analysis modeling package created to simulate a wide range of semiconductor equipment. ToolSim can quickly and accurately model:
- Dielectric Deposition
- PVD/CVD
- Etch
- Photo-lithography (Track)
- Steppers
- Sorters
- CMP (Chemical Mechanical Polishing)
ToolSim 3D simulation models enhance communication among production teams challenged with the selection, configuration and scheduling of semiconductor tools.
Manufacturers use ToolSim to analyze capital equipment investments, discover hidden tool capacity, determine optimal tool configuration, identify and resolve bottlenecks, predict throughput and improve product mix and recipe decisions.
Output includes 3D animation graphics, throughput statistics, preventive maintenance statistics, robot statistics, information on wafer handler arm usage and chronological sequencing details for each wafer.
Users of ToolSim have justified saving millions of dollars by avoiding the purchase of another tool and have demonstrated throughput increases and performance improvements of as much as 20 to 30%.
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